ZnO Thin-Film Transistor Grown by rf Sputtering Using Carbon Dioxide and Substrate Bias Modulation

Figure 3

(a) Drain currents (log scale and square root) of ZnO TFT (sample A1) measured at  V. (b) Drain currents for gate voltages of 30 to −10 V, with a 10-V step.

(a)

(b)