Electromagnetic Wave Shielding Effectiveness Based on Carbon Microcoil-Polyurethane Composites

Table 1

C2H2 flow rate (sccm)	H2 flow rate (sccm)	SF6 flow rate (sccm)	Total pressure (Torr)	Total deposition time (min)	Source gases flow time (min)			Substrate temp. (°C)
					C2H2	H2	SF6
15	35	35	100	90	90	90	5	750