Research Article

Indium-Nitrogen Codoped Zinc Oxide Thin Film Deposited by Ultrasonic Spray Pyrolysis on n-(111) Si Substrate: The Effect of Film Thickness

Figure 1

SEM view of cross-section for the ZnO films with different deposited thicknesses: (a) 154 nm, S1, (b) 385 nm, S2, and (c) 1089 nm, S3. The corresponding surface morphologies were shown in (d) S1, (e) S2, and (f) S3, respectively.
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(a)
861234.fig.001b
(b)
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(c)
861234.fig.001d
(d)
861234.fig.001e
(e)
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(f)