From Plastic to Silicone: The Novelties in Porous Polymer Fabrications

Figure 24

(a) Schematic cross-sectional view of a nanolithography template consisting of a uniform monolayer of PB spherical microdomains on silicon nitride. PB wets the air and substrate interfaces. (b) Schematic of the processing flow when an ozonated copolymer film is used, which produces holes in silicon nitride. (c) Schematic of the processing flow when an osmium-stained copolymer film is used, which produces dots in silicon nitride. Reprinted from [60], with permission from American Association for the Advancement of Science.

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