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Journal of Nanomaterials
Volume 2015, Article ID 194308, 9 pages
Research Article

Substrate Temperature Effect on the Microstructure and Properties of (Si, Al)/a-C:H Films Prepared through Magnetron Sputtering Deposition

1Material Corrosion and Protection Key Laboratory of Sichuan Province, Sichuan University of Science and Engineering, Zigong 643000, China
2State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China

Received 11 May 2015; Revised 3 August 2015; Accepted 4 August 2015

Academic Editor: Dan Xia

Copyright © 2015 Xiaoqiang Liu et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Citations to this Article [1 citation]

The following is the list of published articles that have cited the current article.

  • Mutlu Kundakçı, and Erman Erdoğan, “Influence of substrate and substrate temperature on the structural, optical and surface properties of InGaN thin films prepared by RFMS method,” Microelectronic Engineering, vol. 207, pp. 15–18, 2019. View at Publisher · View at Google Scholar