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Journal of Nanomaterials
Volume 2015, Article ID 194308, 9 pages
http://dx.doi.org/10.1155/2015/194308
Research Article

Substrate Temperature Effect on the Microstructure and Properties of (Si, Al)/a-C:H Films Prepared through Magnetron Sputtering Deposition

1Material Corrosion and Protection Key Laboratory of Sichuan Province, Sichuan University of Science and Engineering, Zigong 643000, China
2State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China

Received 11 May 2015; Revised 3 August 2015; Accepted 4 August 2015

Academic Editor: Dan Xia

Copyright © 2015 Xiaoqiang Liu et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Xiaoqiang Liu, Junying Hao, Hu Yang, Xiuzhou Lin, and Xianguang Zeng, “Substrate Temperature Effect on the Microstructure and Properties of (Si, Al)/a-C:H Films Prepared through Magnetron Sputtering Deposition,” Journal of Nanomaterials, vol. 2015, Article ID 194308, 9 pages, 2015. https://doi.org/10.1155/2015/194308.