Substrate Temperature Effect on the Microstructure and Properties of (Si, Al)/a-C:H Films Prepared through Magnetron Sputtering Deposition

Table 2

Parameters of tribotests.

Contact load (N)	2.0
Sliding speed (m/s)	0.10 (reciprocating mode)
Sliding time (s)	1800
Relative humidity (%)	30–40
Counter face	Stainless steel ball (AISI 52100),; = 3 mm, HRC = 62, Ra = 0.02 m