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Journal of Nanomaterials
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Journal of Nanomaterials
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2015
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Article
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Fig 3
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Research Article
Grown Low-Temperature Microcrystalline Silicon Thin Film by VHF PECVD for Thin Films Solar Cell
Figure 3
XRD patterns of the
μ
c-Si:H thin films deposited at silane concentration from 4 to 13%.