Grown Low-Temperature Microcrystalline Silicon Thin Film by VHF PECVD for Thin Films Solar Cell

<div>Raman spectra of the <i>μ</i>c-Si:H thin films deposited at silane concentration from 4 to 13%. Inset is experimental and Gaussian fitted Raman spectra of <i>μ</i>c-Si:H thin films deposited at the silane concentration of 9%.</div>

Journal of Nanomaterials

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Figure 4

Figure 4: Grown Low-Temperature Microcrystalline Silicon Thin Film by VHF PECVD for Thin Films Solar Cell 