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Journal of Nanomaterials
Volume 2015, Article ID 413687, 8 pages
http://dx.doi.org/10.1155/2015/413687
Research Article

Theoretical Simulation and Optimization on Material Parameters of Thin Film Bulk Acoustic Resonator

1College of Science, Xi’an University of Science and Technology, Xi’an 710054, China
2Laboratory of Modern Acoustics, Institute of Acoustics, Nanjing University, Nanjing 210093, China

Received 20 June 2015; Accepted 6 September 2015

Academic Editor: Jun Chen

Copyright © 2015 Tao Zhang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Tao Zhang, Fujun Liang, Min Li, et al., “Theoretical Simulation and Optimization on Material Parameters of Thin Film Bulk Acoustic Resonator,” Journal of Nanomaterials, vol. 2015, Article ID 413687, 8 pages, 2015. https://doi.org/10.1155/2015/413687.