Focused Ion Beam Assisted Interface Detection for Fabricating Functional Plasmonic Nanostructures

Table 2

Material-dependent currents measured using the EPM for the same sample.

Beam current (nA)	Ion flux (ions cm^−2 s^−1)	Material-dependent current (nA)
		Ag oxide	Ag film	SiO2 substrate
0.3	8.32 × 10^14	0.76	0.70	0.3
1.0	3.12 × 10^15	2.73	2.50	1.0