Journal of Nanomaterials / 2015 / Article / Fig 3

Research Article

Fabrication and Characterization of CNT-Based Smart Tips for Synchrotron Assisted STM

Figure 3

SEM images of a CNT-based smart tip during the fabrication process: (a) Pt90Ir10 with 230 nm thick SiO2 film formed from PECVD; (b) fabricated to expose a 1.2 μm long Pt90Ir10 pillar; (c) attached with a CNT (580 nm in length and 20 nm in diameter); (d) deposited with 70 nm thick Pt on the contact of CNT with Pt90Ir10 pillar; (e) recovered with 50 nm thick SiO2 by localized electron beam assisted CVD of TEOS on the area shown in dashed rectangle; and (f) flipped over and deposited with Pt and recovered with SiO2.

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