Fabrication and Characterization of CNT-Based Smart Tips for Synchrotron Assisted STM

Figure 3

SEM images of a CNT-based smart tip during the fabrication process: (a) Pt₉₀Ir₁₀ with 230 nm thick SiO₂ film formed from PECVD; (b) fabricated to expose a 1.2 μm long Pt₉₀Ir₁₀ pillar; (c) attached with a CNT (580 nm in length and 20 nm in diameter); (d) deposited with 70 nm thick Pt on the contact of CNT with Pt₉₀Ir₁₀ pillar; (e) recovered with 50 nm thick SiO₂ by localized electron beam assisted CVD of TEOS on the area shown in dashed rectangle; and (f) flipped over and deposited with Pt and recovered with SiO₂.