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Journal of Nanomaterials
Volume 2015, Article ID 527025, 6 pages
Research Article

N-Type Conductive Ultrananocrystalline Diamond Films Grown by Hot Filament CVD

Institute of Micro and Nanomaterials, Ulm University, 89081 Ulm, Germany

Received 24 September 2014; Revised 20 January 2015; Accepted 12 February 2015

Academic Editor: Aiying Wang

Copyright © 2015 Michael Mertens et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


We present the synthesis of ultrananocrystalline diamond (UNCD) films by application of hot filament chemical vapor deposition (HFCVD). We furthermore studied the different morphological, structural, and electrical properties. The grown films are fine grained with grain sizes between 4 and 7 nm. The UNCD films exhibit different electrical conductivities, dependent on grain boundary structure. We present different contact metallizations exhibiting ohmic contact behavior and good adhesion to the UNCD surface. The temperature dependence of the electrical conductivity is presented between −200 and 900°C. We furthermore present spectroscopic investigations of the films, supporting that the origin of the conductivity is the structure and volume of the grain boundary.