N-Type Conductive Ultrananocrystalline Diamond Films Grown by Hot Filament CVD

Figure 1

Influence of the substrate temperature on the morphology of the UNCD films is shown in the SEM pictures (a) ca. 570°C, (b) and (c) 580°C–630°C, and (d) ca. 750°C.

(a)

(b)

(c)

(d)