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Journal of Nanomaterials
Volume 2015 (2015), Article ID 543631, 5 pages
Research Article

A Low-Stress, Elastic, and Improved Hardness Hydrogenated Amorphous Carbon Film

1School of Physics, Lanzhou University, Lanzhou 730000, China
2State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China

Received 6 October 2014; Accepted 2 December 2014

Academic Editor: Yuanlie Yu

Copyright © 2015 Qi Wang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


The evolution of hydrogenated amorphous carbon films with fullerene-like microstructure was investigated with a different proportion of hydrogen supply in deposition. The results showed at hydrogen flow rate of 50 sccm, the deposited films showed a lower compressive stress (lower 48.6%), higher elastic recovery (higher 19.6%, near elastic recovery rate 90%), and higher hardness (higher 7.4%) compared with the films deposited without hydrogen introduction. Structural analysis showed that the films with relatively high sp2 content and low bonded hydrogen content possessed high hardness, elastic recovery rate, and low compressive stress. It was attributed to the curved graphite microstructure, which can form three-dimensional covalently bonded network.