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Journal of Nanomaterials
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Journal of Nanomaterials
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2015
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Article
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Fig 4
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Research Article
A Low-Stress, Elastic, and Improved Hardness Hydrogenated Amorphous Carbon Film
Figure 4
TEM images of as-deposited hydrogenated amorphous carbon films versus H
2
flow rate of 50 sccm. The scale bar represents 5 nm.