Finite Element Analysis and Simulation about Microgrinding of SiC

Table 2

Models of the finite element simulation.

Group	Number	Microgrinding depth (nm)	Rake angle (°)	Clearance angle (°)	Nose radium of cutting edge (nm)	Velocity (m/s)
1	1	20	−20	16	5	1
	2	30	−20	16	5	1
	3	40	−20	16	5	1
	4	50	−20	16	5	1
2	1	40	−30	16	5	1
	2	40	−20	16	5	1
	3	40	−10	16	5	1
	4	40	0	16	5	1
3	1	40	−20	12	5	1
	2	40	−20	16	5	1
	3	40	−20	20	5	1
	4	40	−20	24	5	1
4	1	40	−20	16	5	1
	2	40	−20	16	10	1
	3	40	−20	16	15	1
	4	40	−20	16	20	1
5	1	40	−20	16	5	1
	2	40	−20	16	5	5
	3	40	−20	16	5	10
	4	40	−20	16	5	15