Structural and Optical Properties of CuInS₂ Thin Films Prepared by Magnetron Sputtering and Sulfurization Heat Treatment

Table 1

Different process parameters of samples synthesized by different sputtering power.

Sputtering power/W	Gas pressure/Pa	Target voltage/V	Target current/A	Deposition time/min	Treating temperature/°C	Holding time/h	Sulfur weight/g
80	0.4	566	0.14	20	500	2	1
100	0.4	531	0.19	20	500	2	1
120	0.4	573	0.21	20	500	2	1
140	0.4	560	0.25	20	500	2	1
160	0.4	570	0.28	20	500	2	1