Table of Contents Author Guidelines Submit a Manuscript
Journal of Nanomaterials
Volume 2015, Article ID 584320, 7 pages
http://dx.doi.org/10.1155/2015/584320
Research Article

Room Temperature Imprint Using Crack-Free Monolithic SiO2-PVA Nanocomposite for Fabricating Microhole Array on Silica Glass

Art, Science and Technology Center for Cooperative Research, Kyushu University, Kasuga-shi, Fukuoka 816-8580, Japan

Received 12 June 2015; Accepted 11 August 2015

Academic Editor: Nandi Zhou

Copyright © 2015 Shigeru Fujino and Hiroshi Ikeda. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. H. Ito, M. Arai, Y. Matsui, and D. Itagaki, “Experimental testing and FEM simulation for thermal imprinting of micro/nano glass-optical devices,” Journal of Non-Crystalline Solids, vol. 362, no. 1, pp. 246–254, 2013. View at Publisher · View at Google Scholar · View at Scopus
  2. H. Mekaru, T. Tsuchida, J.-I. Uegaki, M. Yasui, M. Yamashita, and M. Takahashi, “Micro lens imprinted on Pyrex glass by using amorphous Ni-P alloy mold,” Microelectronic Engineering, vol. 85, no. 5-6, pp. 873–876, 2008. View at Publisher · View at Google Scholar · View at Scopus
  3. T. Mori, K. Hasegawa, T. Hatano, H. Kasa, K. Kintaka, and J. Nishii, “Surface-relief gratings with high spatial frequency fabricated using direct glass imprinting process,” Optics Letters, vol. 33, no. 5, pp. 428–430, 2008. View at Publisher · View at Google Scholar · View at Scopus
  4. I. Yamada, N. Yamashita, K. Tani et al., “Fabrication of achromatic infrared wave plate by direct imprinting process on chalcogenide glass,” Applied Physics Express, vol. 5, no. 7, Article ID 072601, 2012. View at Publisher · View at Google Scholar · View at Scopus
  5. T. Tamura, M. Umetani, K. Yamada et al., “Fabrication of antireflective subwavelength structure on spherical glass surface using imprinting process,” Applied Physics Express, vol. 3, no. 11, Article ID 112501, 2010. View at Publisher · View at Google Scholar · View at Scopus
  6. T. Han, S. Madden, D. Bulla, and B. Luther-Davies, “Low loss chalcogenide glass waveguides by thermal nano-imprint lithography,” Optics Express, vol. 18, no. 18, pp. 19286–19291, 2010. View at Publisher · View at Google Scholar · View at Scopus
  7. Q. Chen, Q. Chen, and G. MacCioni, “Fabrication of microfluidics structures on different glasses by simplified imprinting technique,” Current Applied Physics, vol. 13, no. 1, pp. 256–261, 2013. View at Publisher · View at Google Scholar · View at Scopus
  8. Q. Chen, Q. Chen, D. Milanese, and M. Ferraris, “Micro-structures fabrication on glasses for micro-fluidics by imprinting technique,” Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, vol. 15, no. 7, pp. 1067–1071, 2009. View at Publisher · View at Google Scholar · View at Scopus
  9. H. Takebe, M. Kuwabara, M. Komori, N. Fukugami, M. Soma, and T. Kusuura, “Imprinted optical pattern of low-softening phosphate glass,” Optics Letters, vol. 32, no. 18, pp. 2750–2752, 2007. View at Publisher · View at Google Scholar · View at Scopus
  10. N. Kobayashi, T. Mori, T. Suetsugu et al., “Fabrication of glasses with low softening temperatures for mold-processing by ion-exchange,” Journal of the Ceramic Society of Japan, vol. 116, no. 1356, pp. 875–879, 2008. View at Publisher · View at Google Scholar · View at Scopus
  11. I. Yamada, N. Yamashita, T. Einishi, M. Saito, K. Fukumi, and J. Nishii, “Design and fabrication of an achromatic infrared wave plate with Sb-Ge-Sn-S system chalcogenide glass,” Applied Optics, vol. 52, no. 7, pp. 1377–1382, 2013. View at Publisher · View at Google Scholar · View at Scopus
  12. M. Takahashi, K. Sugimoto, and R. Maeda, “Nanoimprint of glass materials with glassy carbon molds fabricated by focused-ion-beam etching,” Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, vol. 44, no. 7, pp. 5600–5605, 2005. View at Publisher · View at Google Scholar · View at Scopus
  13. H. Ikeda, S. Fujino, and T. Kajiwara, “Fabrication of micropatterns on silica glass by a room-temperature imprinting method,” Journal of the American Ceramic Society, vol. 94, no. 8, pp. 2319–2322, 2011. View at Publisher · View at Google Scholar · View at Scopus
  14. E. P. Barrett, L. G. Joyner, and P. P. Halenda, “The determination of pore volume and area distributions in porous substances. I. Computations from nitrogen isotherms,” Journal of the American Chemical Society, vol. 73, no. 1, pp. 373–380, 1951. View at Publisher · View at Google Scholar · View at Scopus
  15. S. Brunauer, P. H. Emmett, and E. Teller, “Adsorption of gases in multimolecular layers,” Journal of the American Chemical Society, vol. 60, no. 2, pp. 309–319, 1938. View at Publisher · View at Google Scholar · View at Scopus
  16. H. Ikeda and S. Fujino, “Composition and pH dependence on aggregation of SiO2–PVA suspension for the synthesis of porous SiO2–PVA nanocomposite,” Journal of Porous Materials, vol. 21, no. 6, pp. 1143–1149, 2014. View at Publisher · View at Google Scholar · View at Scopus
  17. F. Kirkbir, H. Murata, D. Meyers, S. R. Chaudhuri, and A. Sarkar, “Drying and sintering of sol-gel derived large SiO2 monoliths,” Journal of Sol-Gel Science and Technology, vol. 6, no. 3, pp. 203–217, 1996. View at Publisher · View at Google Scholar · View at Scopus