Surface Patterning of PEDOT:PSS by Photolithography for Organic Electronic Devices

Figure 6

Photolithography with silver interlayer for PEDOT:PSS patterning. (a) Deposition of PEDOT:PSS, silver film and parylene. (b) UV exposure, (c) developing of resist. (d) Silver etching with silver etchant. (e) Oxygen plasma etching of PEDOT:PSS, (f) removal of resist and silver.