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Journal of Nanomaterials
Volume 2015 (2015), Article ID 703897, 6 pages
Research Article

Comprehensive Evaluation of the Properties of Nanocrystalline Diamond Coatings Grown Using CVD with E/H Field Glow Discharge Stabilization

1V.Ye. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine, 45 Pr. Nauki, Kyiv 03028, Ukraine
2National Science Center “Kharkov Institute of Physics and Technology”, Akademicheskaya Street, Kharkov 61108, Ukraine

Received 2 April 2015; Revised 16 July 2015; Accepted 21 July 2015

Academic Editor: Lili Zhang

Copyright © 2015 Iu. Nasieka et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


The nanocrystalline diamond films (coatings) were prepared using the plasma enhanced chemical vapor deposition (PECVD) technique. In this method, direct current (DC) glow discharge in the crossed E/H fields was used to activate the gas phase. The diamond coatings were deposited from the working gas mixture CH4/H2 with addition of nitrogen in various concentrations. It was ascertained that addition of N2 to the working gas mixture leads to reduction in the sizes of diamond grains as well as to the substantial decrease in the resistivity of the studied films. The electrophysical data are in good agreement with the changes induced by varying the N2 content in the Raman scattering spectra. The increase in the N2 concentration causes significant lowering of the crystalline diamond related peak and increase in the intensity of the peaks related to the sp2-bonded carbon. These changes in the spectra indicate significant disordering of the structure of prepared films and its uniformity in the nanodiamond film volume. With the great possibility, it is associated with a decrease in the sizes of diamond crystalline grains and tendency of NCD film to amorphization.