Research Article
Vision-Augmented Molecular Dynamics Simulation of Nanoindentation
Table 3
Computational results obtained from the nanoindentation simulation.
| Silicon | (010) orientation | (110) orientation | (111) orientation |
| Average hardness (GPa) at indent depth of 2 nm | 16.99 | 18.22 | 18.48 | Elastic modulus (GPa) at indent depth of 2 nm | 129 | 147 | 167 | (extent of elastic recovery) | 1.17/2 =0.585 | 1.36/2 =0.68 | 1.47/2 =0.735 | Peak maximum von Mises stress in the indent zone (GPa) | 11.07 | 22.75 | 16.72 | Peak maximum Tresca stress in the indent zone (GPa) | 5.91 | 12.11 | 9.14 | Peak maximum octahedral shear stress in the indent zone (GPa) | 5.21 | 10.72 | 7.88 | Peak hydrostatic stress in the indent zone (GPa) | 20.11 | 21.98 | 16.62 | Peak temperature in the indentation zone (K) | 300 | 419 | 438 | Features of the - curve during unloading | Elbow formation corresponding to a-Si formation | No feature | No feature |
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