Vision-Augmented Molecular Dynamics Simulation of Nanoindentation

Table 3

Computational results obtained from the nanoindentation simulation.

Silicon	(010) orientation	(110) orientation	(111) orientation
Average hardness (GPa) at indent depth of 2 nm	16.99	18.22	18.48
Elastic modulus (GPa) at indent depth of 2 nm	129	147	167
(extent of elastic recovery)	1.17/2; =0.585	1.36/2; =0.68	1.47/2; =0.735
Peak maximum von Mises stress in the indent zone (GPa)	11.07	22.75	16.72
Peak maximum Tresca stress in the indent zone (GPa)	5.91	12.11	9.14
Peak maximum octahedral shear stress in the indent zone (GPa)	5.21	10.72	7.88
Peak hydrostatic stress in the indent zone (GPa)	20.11	21.98	16.62
Peak temperature in the indentation zone (K)	300	419	438
Features of the - curve during unloading	Elbow formation corresponding to a-Si formation	No feature	No feature