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Journal of Nanomaterials
Volume 2015, Article ID 864591, 6 pages
http://dx.doi.org/10.1155/2015/864591
Research Article

Ferroelectricity, Piezoelectricity, and Dielectricity of 0.06PMnN-0.94PZT(45/55) Thin Film on Silicon Substrate

1College of Science, Xi’an University of Science and Technology, Xi’an 710054, China
2Lab of Modern Acoustics, Institute of Acoustics, Nanjing University, Nanjing 210093, China

Received 12 September 2015; Accepted 11 October 2015

Academic Editor: Jun Chen

Copyright © 2015 Tao Zhang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. P. Muralt, “PZT thin films for microsensors and actuators: where do we stand?” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 47, no. 4, pp. 903–915, 2000. View at Publisher · View at Google Scholar · View at Scopus
  2. P. B. Kirby, Q. X. Su, E. Komuro, Q. Zhang, M. Imura, and R. W. Whatmore, “PZT thin film bulk acoustic wave resonators and filters,” in Proceedings of the IEEE International Frequency Control Symposium and PDA Exhibition, pp. 687–694, Seattle, Wash, USA, June 2001.
  3. P. Muralt, J. Antifakos, M. Cantoni, R. Lanz, and F. Martin, “Is there a better material for thin film BAW applications than A1N?” in Proceedings of the IEEE Ultrasonics Symposium, vol. 1, pp. 315–320, Rotterdam, The Netherlands, September 2005. View at Publisher · View at Google Scholar · View at Scopus
  4. T. Zhang, H. Zhang, Z.-Q. Wang, and S.-Y. Zhang, “Effects of electrodes on performance figures of thin film bulk acoustic resonators,” Journal of the Acoustical Society of America, vol. 122, no. 3, pp. 1646–1651, 2007. View at Publisher · View at Google Scholar · View at Scopus
  5. Y. W. Yang, X. Shi, H. R. Lan et al., “Investigation on behavior of the vibration-based piezoelectric energy harvester array in ultracapacitor charging,” Applied Physics Letters, vol. 106, no. 17, Article ID 173902, 2015. View at Publisher · View at Google Scholar
  6. X.-H. Du, J. Zheng, U. Belegundu, and K. Uchino, “Crystal orientation dependence of piezoelectric properties of lead zirconate titanate near the morphotropic phase boundary,” Applied Physics Letters, vol. 72, no. 19, pp. 2421–2423, 1998. View at Publisher · View at Google Scholar · View at Scopus
  7. D. Fu, H. Suzuki, T. Ogawa, and K. Ishikawa, “High-piezoelectric behavior of c-axis-oriented lead zirconate titanate thin films with composition near the morphotropic phase boundary,” Applied Physics Letters, vol. 80, no. 19, pp. 3572–3574, 2002. View at Publisher · View at Google Scholar · View at Scopus
  8. T. Zhang, K. Wasa, I. Kanno, and S.-Y. Zhang, “Ferroelectric properties of Pb (Mn1/3 Nb2/3) O3–Pb (Zr,Ti) O3 thin films epitaxially grown on (001)MgO substrates,” Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, vol. 26, no. 4, pp. 985–990, 2008. View at Publisher · View at Google Scholar · View at Scopus
  9. T. Zhang, S.-Y. Zhang, K. Wasa et al., “Effects of Pb(Mn,Nb)O3 doping on the properties of PZT-based films deposited on silicon substrates,” Physica Status Solidi (A), vol. 208, no. 10, pp. 2460–2466, 2011. View at Publisher · View at Google Scholar · View at Scopus
  10. Z. H. Duan, P. Chang, Z. G. Hu et al., “Temperature dependent Raman scattering and far-infrared reflectance spectra of MgO modified Pb0.99(Zr0.95Ti0.05)0.98Nb0.02O3 ceramics: a composition effect,” Journal of Applied Physics, vol. 116, Article ID 093513, 2014. View at Publisher · View at Google Scholar
  11. P. Tirupathi, N. Kumar, M. Pastor, A. C. Pandey, and R. N. Choudhary, “Diffused phase transitions in Pb Pb(Zr0.65Ti0.35)O3-Pb(Fe2/3W1/3)O3 multiferroics,” Journal of Applied Physics, vol. 117, no. 7, Article ID 074105, 2015. View at Publisher · View at Google Scholar
  12. I. Kanno, H. Kotera, and K. Wasa, “Measurement of transverse piezoelectric properties of PZT thin films,” Sensors and Actuators A: Physical, vol. 107, no. 1, pp. 68–74, 2003. View at Publisher · View at Google Scholar · View at Scopus