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Journal of Nanomaterials
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Journal of Nanomaterials
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2015
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Article
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Fig 3
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Research Article
Mobility Limitations due to Dislocations and Interface Roughness in AlGaN/AlN/GaN Heterostructure
Figure 3
AFM image of the AlGaN/AlN/GaN heterostructure with an RMS roughness of 0.13 nm.