Fabrication of Spin-Transfer Nano-Oscillator by Colloidal Lithography

Figure 1

Nanopillar fabrication process. (a) Patterning contact pads and the mesa by optical lithography and Argon ion etching. (b) Protecting the contacts by photoresist and coating the polystyrene nanospheres. (c) Argon ion etching. (d) Depositing SiO₂ insulating layer and removing the nanospheres and photoresist. (e) Depositing the contacts through photolithography and e-beam evaporation.

(a)

(b)

(c)

(d)

(e)