Metal/Metal-Oxide Nanoclusters for Gas Sensor Applications

Figure 7

Schematic diagram of the metallic electrode structures. (a) Top view of the interdigitated structure. (b) Side view of substrate used for the two-point structure. (c) Side view of substrate used for the FET structure. (d) Steps of the photolithography process.

(a)

(b)

(c)

(d)