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Journal of Nanomaterials
Volume 2016 (2016), Article ID 3727514, 8 pages
http://dx.doi.org/10.1155/2016/3727514
Research Article

A Method to Control Dynamic Errors of the Stylus-Based Probing System for the Surface Form Measurement of Microstructures

School of Manufacturing Science and Engineering, Sichuan University, 24 South No. 1 Ring Road, Chengdu 610065, China

Received 25 December 2015; Accepted 12 April 2016

Academic Editor: James Piao

Copyright © 2016 Hui Fang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Hui Fang, Bin Xu, Deqiang Yin, and Shiping Zhao, “A Method to Control Dynamic Errors of the Stylus-Based Probing System for the Surface Form Measurement of Microstructures,” Journal of Nanomaterials, vol. 2016, Article ID 3727514, 8 pages, 2016. doi:10.1155/2016/3727514