Determination of the Elastic Behavior of Silicon Nanowires within a Scanning Electron Microscope

Figure 1

Sample overview: (a) SEM image with double-anchored nanowires, where the ends are rigidly connected to triangular bulk anchors; (b) TEM cross-sectional image of the smallest silicon nanowire with a trapezoidal shape ( = 35 nm, = 66 nm, and = 168 nm); (c) TEM cross-sectional image of the largest silicon nanowire with a pentagonal shape ( = 74 nm, = 112 nm, = 168 nm, and = 198 nm); (c1) high-resolution TEM image shows the native oxide layer; (c2) the diffraction pattern confirms the crystallinity and orientation of the wire.