Determination of the Elastic Behavior of Silicon Nanowires within a Scanning Electron Microscope

Figure 3

Force-displacement curves for the 35 nm wide nanowire: (a) results of 16 experiments, (b) overlay of the mean experimental curve and FEM simulations for a modulus of elasticity of 169 GPa, where nanowires exhibit twisting at a deflection value beyond 100 nm (see SEM images below; scale bar: 2 μm) leading to a different slope in the loading curve, and (c) FEM model of the twisting phenomenon along with the deformed nanowire configuration.

(a)

(b)

(c)