Structure-Dependent Mechanical Properties of ALD-Grown Nanocrystalline BiFeO₃ Multiferroics

Figure 1

XRD spectra recorded for BiFeO₃ thin films deposited by the ALD method on the Si/SiO₂/Pt substrate and subsequently annealed for 5, 15, 30, or 60 minutes (the samples S-0, S-5, S-30, and S-60 according to our notation).