(a)
(b)
(c)
Figure 4: The surface morphology of the BFO samples S-0 (a) and S-60 (b) intended for nanomechanical testing and the results of nanoindentation examinations (c). The SPM micrographs of selected area of the S-0 and S-60 samples reveal features characteristic for an ALD-grown (a) and thoroughly annealed ( min,  K) material (b). The nanoindentation load-depth curves are recorded for various maximum loads of 200, 400, and 1000 μN, for both S-0 (black) and S-60 (red) thin films (c).