Research Article

Structure-Dependent Mechanical Properties of ALD-Grown Nanocrystalline BiFeO3 Multiferroics

Table 1

The Bi/Fe ratio concluded from EDS measurements carried out for BiFeO3 thin films.

SampleBi/Fe ratio

Nonannealed1.07 ± 0.02
5 min1.03 ± 0.02
30 min1.04 ± 0.02
60 min0.97 ± 0.02