Research Article

The Optimum Fabrication Condition of p-Type Antimony Tin Oxide Thin Films Prepared by DC Magnetron Sputtering

Table 3

The results of the Hall measurements of 15% ATO films annealed at different temperatures for 1 h and 2 h after being deposited at room temperature.

(°C)ATO films annealed for 1 h ATO films annealed for 2 h
(Ω·cm) (cm2V−1s−1) (cm−3)Sample (Ω·cm) (cm2V−1s−1) (cm−3)Type

50030.601.721.2 × 1017A130.782.483.2 × 1018p
5500.831.734.4 × 1018A141.001.135.5 × 1018p
6004.202.905.1 × 1017A152.131.132.6 × 1018p