Research Article
The Optimum Fabrication Condition of p-Type Antimony Tin Oxide Thin Films Prepared by DC Magnetron Sputtering
Table 3
The results of the Hall measurements of 15% ATO films annealed at different temperatures for 1 h and 2 h after being deposited at room temperature.
| (°C) | ATO films annealed for 1 h | ATO films annealed for 2 h | (Ω·cm) | (cm2V−1s−1) | (cm−3) | Sample | (Ω·cm) | (cm2V−1s−1) | (cm−3) | Type |
| 500 | 30.60 | 1.72 | 1.2 × 1017 | A13 | 0.78 | 2.48 | 3.2 × 1018 | p | 550 | 0.83 | 1.73 | 4.4 × 1018 | A14 | 1.00 | 1.13 | 5.5 × 1018 | p | 600 | 4.20 | 2.90 | 5.1 × 1017 | A15 | 2.13 | 1.13 | 2.6 × 1018 | p |
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