The Relationship between Nanocluster Precipitation and Thermal Conductivity in Si/Ge Amorphous Multilayer Films: Effects of Cu Addition

Figure 3

Distribution of four-coordinate atoms in every specimen in direction ( surface). (a) Specimen 1: Si/Ge, (b) Specimen 2: Si/(Ge + Cu), (c) Specimen 3: (Si + Cu)/(Ge + Cu), (d) Specimen 4: Si/Cu/Ge/Cu, and (e) Specimen 5: Si/Cu/Ge. (1) Before annealing and (2) after annealing.

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