Research Article

Performance of GaN-Based LEDs with Nanopatterned Indium Tin Oxide Electrode

Figure 1

Schematic fabrication process for nanopatterned ITO electrode. (a) Deposition of PS spheres on the ITO electrode surface. (b) ICP etching to nanopatterned ITO electrode. (c) Removal of the PS nanospheres. (d) Schematic illustration of the GaN-based blue LEDs with nanopatterned ITO electrode.
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