Mechanical and Tribological Properties of Carbon-Based Graded Coatings

Table 2

Deposition parameters of carbon graded coatings.

Step	Cr	C	C2H2	Ar	N2	Time	Thickness
	[W]	[W]	[sccm]	[sccm]	[sccm]	[min]	[nm]
Version A
1	1400	50	5	45	0	14	270
2	1230	410	4.4	45.6	0	14
3	1060	780	3.8	46.2	0	14
4	890	1150	3.1	45.2	1.7	14	530
5	720	1520	2.5	44.2	3.3	14
6	550	1890	1.9	43.1	5.0	14
7	380	2260	1.3	42	6.7	14
8	210	2630	0.6	41.1	8.3	14
9	50	3000	0	40	10.0	14
10	0	3000	0	40	10.0	30	200
Version B
1	1400	50	5	45	0	14
2	1230	410	4.4	45.6	0	14
3	1060	780	3.8	46.2	0	14
4	890	1150	3.1	46.9	0	14	530
5	720	1520	2.5	47.5	0	14
6	550	1890	1.9	48.1	0	14
7	380	2260	1.3	45.4	3.3	14
8	210	2630	0.6	42.7	6.7	14	270
9	50	3000	0	40	10.0	14
10	0	3000	0	40	10	30	200
Version C
1	1400	50	20	30	0	14
2	1230	410	22.5	27.5	0	14
3	1060	780	25	25	0	14
4	890	1150	27.5	22.5	0	14	530
5	720	1520	30	20	0	14
6	550	1890	32.5	18.5	0	14
7	380	2260	35	11.7	3.3	14
8	210	2630	37.5	5.8	6.7	14	270
9	50	3000	40	0	10.0	14
10	0	3000	0	40	10	30	200