Fabrication of Si/SiO₂ Superlattice Microwire Array Solar Cells Using Microsphere Lithography

Figure 3

(a) Surface SEM image of a PS-particle-array-coated Si/SiO₂ SL. (b) Surface SEM image of a Si/SiO₂ SLMW array after RIE. (c) Cross-sectional SEM image of a Si/SiO₂ SLMW. The yellow dashed line represents the fitting line based on the wire shape function given by (1).

(a)

(b)

(c)