Molecular Dynamics Simulation of Nanoindentation of Cu/Au Thin Films at Different Temperatures

Figure 3

The lattice evolution of thin films during nanoindentation at 0 K.

(a) Deposit 1.8

(b) Ideal 1.8

(c) Deposit 2.7

(d) Ideal 2.7

(e) Deposit 3.6

(f) Ideal 3.6