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Journal of Nanomaterials
Volume 2017, Article ID 1374973, 8 pages
Research Article

Morphology, Microstructure, and Hydrogen Content of Carbon Nanostructures Obtained by PECVD at Various Temperatures

1Departamento de Investigación en Física, Universidad de Sonora, Apdo. Postal 5-088, 83190 Hermosillo, SON, Mexico
2Faculty of Physics, University of Bucharest, 405 Atomistilor Street, 077125 Măgurele, Romania
3Instituto Tecnológico de Hermosillo, Avenida Tecnológico S/N, Col. Sahuaro, 83170 Hermosillo, SON, Mexico
4National Institute for Lasers, Plasma and Radiation Physics, Atomistilor No. 409, P.O. Box MG-36, Măgurele, Bucharest, Romania
5Horia Hulubei National Institute of Physics and Nuclear Engineering, 30 Reactorului Street, Măgurele, 077125 Ilfov, Romania
6National Institute for R&D in Microtechnologies, 126A Erou Iancu Nicolae Street, Voluntari, Romania

Correspondence should be addressed to S. Vizireanu; or.mifni@iziv_s

Received 16 March 2017; Revised 6 July 2017; Accepted 27 July 2017; Published 11 September 2017

Academic Editor: Yoke K. Yap

Copyright © 2017 M. Acosta Gentoiu et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Carbon nanostructures were obtained by acetylene injection into an argon plasma jet in the presence of hydrogen. The samples were synthesized in similar conditions, except that the substrate deposition temperatures were varied, ranging from 473 to 973 K. A strong dependence of morphology, structure, and graphitization upon was found. We obtained vertical aligned carbon nanotubes (VA-CNTs) at low temperatures as 473 K, amorphous carbon nanoparticles (CNPs) at temperatures from about 573 to 673 K, and carbon nanowalls (CNWs) at high temperatures from 773 to 973 K. Fourier transform infrared spectroscopy, scanning electron microscopy, transmission electron microscopy, elastic recoil detection analysis, X-ray photoelectron spectroscopy, and Raman spectroscopy were used to substantiate the differences in these material types. It is known that hydrogen concentration modifies strongly the properties of the materials. Different concentrations of hydrogen-bonded carbon could be identified in amorphous CNP, VA-CNT, and CNW. Also, the H : C ratios along depth were determined for the obtained materials.