Effect of Phosphate Buffered Saline Solutions on Top-Down Fabricated ZnO Nanowire Field Effect Transistor

Figure 1

Illustrated process flow of ZnO nanowire biosensor: (a) SiO₂ grown and etched on p-Si, (b) ZnO film deposited in ALD, (c) ZnO etched using spacer technique, and (d) Al contacts were sputtered and (e) SU-8 photoresist was coated and patterned.

(a)

(b)

(c)

(d)

(e)