Research Article
Investigation of the Influence of Ni Doping on the Structure and Hardness of Ti-Ni-C Coatings
Table 3
Overview of the coatings prepared by HiPIMS.
| C (at. %) | Lattice parameter (Å) | Grain size (nm) | a-C:H phase (%) | MGS (nm) | Hardness (GPa) |
| Ni-free | | | | | | 25.0 | 4.2502 | 36.5 | | | 15.1 ± 1.3 | 40.0 | 4.2950 | 24.1 | 5.8 | 0.221 | 34.5 ± 2.5 | 49.0 | 4.3180 | 27.9 | 14.1 | 0.671 | 38.3 ± 2.7 | 53.0 | 4.3216 | 22.4 | 16.6 | 0.650 | 40.0 ± 3.0 | 57.0 | 4.3130 | 10.0 | 25.2 | 0.483 | 44.7 ± 3.8 | 68.0 | 4.2890 | 5.5 | 55.4 | 0.873 | 31.5 ± 3.6 | Ni-doped | | | | | | 22.9 | 4.2600 | 4.3 | 5.7 | 0.043 | 17.3 ± 0.8 | 33.8 | 4.3033 | 5.5 | 8.6 | 0.084 | 26.8 ± 2.1 | 36 | 4.3118 | 7.5 | | | 33.8 ± 1.5 | 47.7 | 4.3185 | 15.5 | 12.1 | 0.341 | 38.2 ± 4.1 | 50.7 | 4.3120 | 1.6 | 13.9 | 0.041 | 33.6 ± 4.4 | 63 | 4.2982 | 3.0 | 37.0 | 0.264 | 24.6 ± 4.1 | 77.2 | 4.2930 | 2.0 | 70.2 | 0.576 | 20.4 ± 1.7 |
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