Dynamic Interferometry Lithography on a TiO₂ Photoresist Sol-Gel for Diffracting Deflector Module

Figure 14

The two types of setup for the solar tests: architecture A (a) shows a side view of the module with a black cover on the diffraction grating in order to prevent the light from illuminating it; architecture B (b) is the same without the black cover to allow the grating to deflect the light.

(a)

(b)