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Journal of Nanomaterials
Volume 2017, Article ID 9057250, 6 pages
Research Article

Hydrogen Gas Sensing Using Palladium-Graphene Nanocomposite Material Based on Surface Acoustic Wave

1School of Electrical Engineering, Hanoi University of Science and Technology (HUST), No. 1 Dai Co Viet Road, Hanoi, Vietnam
2Department of General Physics, School of Engineering Physics, Hanoi University of Science and Technology (HUST), No. 1 Dai Co Viet Road, Hanoi, Vietnam

Correspondence should be addressed to Hoang Si Hong; nv.ude.tsuh@ysgnaoh.gnoh

Received 11 March 2017; Accepted 4 May 2017; Published 25 May 2017

Academic Editor: Birol Ozturk

Copyright © 2017 Nguyen Hai Ha et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


We report the fabrication and characterization of surface acoustic wave (SAW) hydrogen sensors using palladium-graphene (Pd-Gr) nanocomposite as sensing material. The Pd-Gr nanocomposite as sensing layer was deposited onto SAW delay line sensor-based interdigitated electrodes (IDTs)/aluminum nitride (AlN)/silicon (Si) structure. The Pd-Gr nanocomposite was synthesized by a chemical route and deposited onto SAW sensors by air-brush spraying. The SAW H2 sensor using Pd-Gr nanocomposite as a sensing layer shows a frequency shift of 25 kHz in 0.5% H2 concentration at room temperature with good repeatability and stability. Moreover, the sensor showed good linearity and fast response/recovery within ten seconds with various H2 concentrations from 0.25 to 1%. The specific interaction between graphene and SAW transfer inside AlN/Si structures yields a high sensitivity and fast response/recovery of SAW H2 sensor based on Pd-Gr/AlN/Si structure.