Research Article

Low Power Switching Characteristics of CNT Field Effect Transistor Device with Al-Doped ZrHfO2 Gate Dielectric

Figure 1

(a) A 3D scheme of CNT FET device on high-k dielectric. (b) An optical microscope image of CNT FET device including source-drain electrode and CNT channel region. (c) An AFM image of CNT network. (d) A SEM image of the interface between CNT network and Al electrode.