Research Article
Graphene Membrane as Suspended Mask for Lithography
Figure 4
SEM micrographs on suspended membranes carved by FIB with a dose of 5000 μC/cm2. In the photograph on (b), we measured the radius of a circle inscribed in the corner of the engraved triangle obtaining a value of ~19 nm, hardly obtainable with the conventional polymeric masks.
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