Journal of Nanomaterials / 2018 / Article / Fig 2

Research Article

Surface Profile Measurement and Error Compensation of Triangular Microstructures Employing a Stylus Scanning System

Figure 2

SEM images of the microstructures on the surface of the measured workpiece: (a) SEM image (scale: 200 μm) and (b) details of microstructures (scale: 30 μm).

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