Geometry-Controlled Carbon Coils by SF₆ Flow Injection Time with Reaction Temperature

Table 1

Experimental conditions for the deposition of samples A–L.

Samples	C2H2 flow rate (sccm)	C2H2 flow injection time (min)	SF6 flow rate (sccm)	SF6 flow injection time (min)	Total pressure (Torr)	Substrate temperature (°C)
A	500	60	40	5	100	550
B	500	60	40	15	100	550
C	500	60	40	30	100	550
D	500	60	40	60	100	550
E	500	60	40	5	100	650
F	500	60	40	15	100	650
G	500	60	40	30	100	650
H	500	60	40	60	100	650
I	500	60	40	5	100	750
J	500	60	40	15	100	750
K	500	60	40	30	100	750
L	500	60	40	60	100	750