Sputtered PdO Decorated TiO₂ Sensing Layer for a Hydrogen Gas Sensor

Figure 6

The time sequential sensor signal output with heater power consumption. The H₂ gas concentration of 100, 200, and 400 ppm was sequentially applied to the PdO decorated TiO₂ films with PdO thickness of (a) 3, (b) 4.5, (c) 6.5, and (d) 13 nm on the TiO₂ film.

(a)

(b)

(c)

(d)