Research Article
The Carrier Transport Properties of B-Doped Si Nanocrystal Films with Various Doping Concentrations
Table 1
Room temperature Hall measurement of B-doped Si NC films with various doping concentrations.
| Sample | Carrier concentration | Dark conductivity |
| Undoped Si NCs | cm-3 | S·cm-1 | B-doped Si NCs ( sccm) | cm-3 | 174 S·cm-1 | B-doped Si NCs ( sccm) | cm-3 | 272 S·cm-1 | B-doped Si NCs ( sccm) | cm-3 | 456 S·cm-1 |
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