Characteristics of Metal–Semiconductor–Metal Ultraviolet Photodetectors Based on Pure ZnO/Amorphous IGZO Thin-Film Structures

Figure 2

(a, b) SEM images of pure ZnO and a-IGZO thin films. (c, d) AFM images of 40 nm pure ZnO and 40 nm a-IGZO thin films. (e) XRD spectra of pure ZnO and a-IGZO thin films.

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